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Surface acoustic wave sensors, biosensors and "Labs on a chip"

The use of surface acoustic wave sensors (Rayleigh, Love) has greatly developed and enables the detection of different physical parameters like pressure, temperature or mass. Rayleigh surface acoustic wave sensors are also used as a microfluidic tool. Specific systems have been set up based on multilayer structures (ZnO/AlN) and bulk substrates (Quartz, LiNbO3, etc.).

Supervisor: SARRY Frédéric
Participants: Frédéric Sarry, Denis Beyssen, Omar Elmazria,




<font size="1"><i>SAW gas sensor</font></i>

Love wave sensor for the detection of SO2 with a sensitive PUI layer rendered functional by tertiary amine sites.

Polymer functionalization is a promising way of creating sensitive layers. In this work, polyurethaneimides (PUI) containing tertiary amine sites were synthesized with a view to detecting SO2 and were associated with a Love wave sensor (ZnO/Quartz ST-X+90) which was optimized specifically for this purpose. The system was found to possess a good level of sensitivity to SO2 according to the polymer structure and the accessibility of the gas to the tertiary amine sites.

Partners: Laboratoire de Chimie Physique Macromoleculaire (LCPM), ENSIC, University of Lorraine.

Heating droplets using Rayleigh-SAW waves

Fluidic microsystem based on the interaction R-SAW / Liquid

Rayleigh-type elastic surface waves were used as a microfluidic tool to induce internal mixing within the droplet and/or to heat and/or activate it.

We are currently studying a system which can be used to carry out a Polymerase Chain Reaction (PCR, duplication of DNA using a temperature cycle from 95°C to 50-60°C to 72°C) assisted by Rayleigh-type elastic surface waves. We use the Rayleigh-SAW/Liquid interaction to achieve this temperature cycle.

This heating system based on R-SAW is made up of a multilayer LiNbO3 Y+128°/IDT/AlN structure which is an alternative to conventional industrial thermal cyclers. Our system induces internal mixing as well as heating the droplets. This mixing is positive as it increases the probability of biological species meeting each other which is more limited in a highly viscous medium.

Partners: Pr Becuwe, S. Grandemange, Equipe SIGRETO, CRAN UMR CNRS 7039, University of Lorraine.

<font size="1"><i>Hybrid SPR, SAW structure</font></i>

"AWESOM" project financed by the French National Research Agency (ANR)

This project is dedicated to the design, production and optimization of a hybrid "Lab-on-a-chip" which combines SAW actuators and biosensors (SPR, microcalorimeter) to actively control and characterize biofluids.

Partners: IEMN (Institut d’Electronique, de Microélectronique et de Nanotechnologie), UMI-LN2 (Laboratoire de Nanotechnologie et Nanosystems), INSP (Institut des NanoSciences de Paris), IJL (Institut Jean Lamour) and MSC (Matière et Systèmes Complexes).

Liste de publications :

T. Roux-Marchand et al., Study of a microfluidic thermocycler assisted R-SAW, accepté (2012).
D. Mercier et al., Sensors and Actuators A : Physical 188, pp. 41-47 (2012).
K.J. Singh et al., IEEE Sensors Journal (6), art. no 5598508, pp. 1458–1464 (2011).
P. Nicolay et al., IEEE Transactions on UFFC, vol 56, no 3, 684-689 (2010).
F. Moreira et al., European Physical Journal Applied Physics, vol. 47, no. 1, p.12702 (2009).
P. Nicolay et al., Applied Physics Letters 92, 141909 (2008)
F. Moreira et al., IEEE Sensors Journal, vol. 8, no 8, 1399-1403 (2008).
P. Nicolay et al., Ferroelectrics, 351, 225-235 (2007).
F. Moreira, et al., IEEE Sensors Journal, vol. 7, no 3, 336-341 (2007). 
D. Beyssen et al., Sensors & Actuators: B. Chemical vol. 118 issue 1-2 October 25, p. 380-385 (2006).
A. Talbi et al., Sensors and Actuators A 128, 78-83 (2006).
P. Nicolay et al., Sensors and Actuators A 120, 562–566 (2005).
A. Talbi et al., IEEE Transactions on UFFC, vol 51, no 11, 1421-1426 (2004).
A. Talbi et al., Ferroelectrics, vol. 273, 53-58 (2002).