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Article

Title: Analysis of the transport of ionized titanium atoms in a highly ionized sputter deposition process.
Author(s): L De Poucques, J-C Imbert, C Boisse-Laporte, J Bretagne, M Ganciu, L Teulé-Gay, P Vasina and M Touzeau
Journal: Plasma processes and polymers
Year: 2007
Volume: 4
Pages: S424
Note: Département CP2S : ESPRITS

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