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Title: Preliminary Synthesis of Carbon Nitride Thin Films by N2/CH4 Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films
Author(s): P. Kouakou, V. Brien, M.B. Assouar, V. Hody, M. Belmahi, H.N. Migeon and J. Bougdira
Journal: Plasma Process. Polym.
Year: 2007
Volume: 4
Pages: S210-S214
Note: Département CP2S : ESPRITS

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