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Article
| Titre: | Substrate temperature influenced physical behaviour of dc magnetron sputtered MoO3 films |
|---|---|
| Auteur(s): | S. Uthanna, V. Nirupama, O.Md. Hussain et J.F. Pierson |
| Journal: | Applied Surface Science |
| Année: | 2010 |
| Volume: | 256 |
| Pages: | 3133-3137 |
| Projet: | Département CP2S : EFCM |