Title: | Mastering the biaxial stress state in nanometric thin films on flexible substrates |
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Author(s): | D. Faurie, P.-O. Renault, E. Le Bourhis, G. Geandier, P. Goudeau and D. Thiaudière |
Journal: | Applied Surface Science |
Year: | 2014 |
Volume: | 306 |
Pages: | 70--74 |
Publisher: | Elsevier BV |
DOI: | 10.1016/j.apsusc.2014.02.032 |
ISSN: | 0169-4332 |
File URL: | http://dx.doi.org/10.1016/j.apsusc.2014.02.032 |
Note: | Département SI2M : Microstructures et Contraintes |