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Title: A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature
Author(s): I. Jauberteau, S. Weber, A. Bessaudou, A. Passelergue, R. Mayet, J.L. Jauberteau S. Touimi and J. Aubreton
Journal: Materials Science and Engineering
Year: 2010
Volume: 12
Note: Centres de Compétences : CC MEM

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