Titre: | AlN/ZnO/diamond waveguiding layer acoustic wave structure: Theoretical and experimental results |
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Auteurs: | Le Brizoual, L., Elmazria, O., Zhgoon, S., Soussou, A., Sarry, F. and Djouadi, M.A. |
Journal: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Annee: | 2010 |
Volume: | 57 |
olabel_issue: | 8 |
Pages: | 1818-1824 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |