Publications: Articles
Article
| Titre: | Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications |
|---|---|
| Auteurs: | Mortet, V., Vasin, A., Jouan, P.-Y., Elmazria, O. and Djouadi, M.-A. |
| Journal: | Surface and Coatings Technology |
| Annee: | 2003 |
| Volume: | 176 |
| olabel_issue: | 1 |
| Pages: | 88-92 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |