Titre: | High velocity SAW using aluminum nitride film on unpolished nucleation side of free-standing CVD diamond |
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Auteurs: | Elmazria, O., Mortet, V., El Hakiki, M., Nesládek, M. and Alnot, P. |
Journal: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Annee: | 2003 |
Volume: | 50 |
olabel_issue: | 6 |
Pages: | 710-715 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |