Titre: | ZnO/AlN/diamond layered structure for SAW devices combining high velocity and high electromechanical coupling coefficient |
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Auteurs: | El Hakiki, M., Elmazria, O., Assouar, M.B., Mortet, V., Le Brizoual, L., Vanecek, M. and Alnot, P. |
Journal: | Diamond and Related Materials |
Annee: | 2005 |
Volume: | 14 |
olabel_issue: | 3-7 |
Pages: | 1175-1178 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |