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Publications: Articles

Article

Titre: Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band
Auteurs: Kirsch, P., Assouar, M.B., Elmazria, O., El Hakiki, M., Mortet, V. and Alnot, P.
Journal: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Annee: 2007
Volume: 54
olabel_issue: 7
Pages: 1486-1491
Equipe: Centre de Compétences : MiNaLor micro et nanotechnologies

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