Publications: Articles
Article
| Titre: | Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering |
|---|---|
| Auteurs: | Elmazria, O., Assouar, M.B., Renard, P. and Alnot, P. |
| Journal: | Physica Status Solidi (A) Applied Research |
| Annee: | 2003 |
| Volume: | 196 |
| olabel_issue: | 2 |
| Pages: | 416-421 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |