Publications: Articles
Article
| Titre: | Sezawa mode SAW pressure sensors based on ZnO/Si structure |
|---|---|
| Auteurs: | Talbi, A., Sarry, F., Le Brizoual, L., Elmazria, O. and Alnot, P. |
| Journal: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Annee: | 2004 |
| Volume: | 51 |
| olabel_issue: | 11 |
| Pages: | 1421-1426 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |