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References

Articles:
•	Mortet, V., Vasin, A., Jouan, P.-Y., Elmazria, O. and Djouadi, M.-A. Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications Surface and Coatings Technology, 176(1):88-92 2003 http://www.scopus.com/inw...719e9e2e7551164c9e3c48997 Equipe: Centre de Compétences : MiNaLor micro et nanotechnologies
•	Mortet, V., Elmazria, O., Nesládek, M., D'Haen, J., Vanhoyland, G., Elhakiki, M., Tajani, A., Bustarret, E., Gheeraert, E., D'Olieslaeger, M. and Alnot, P. Study of aluminium nitride/freestanding diamond surface acoustic waves filters Diamond and Related Materials, 12(3-7):723-727 2003 http://www.scopus.com/inw...7684ae2924f00f343a14021ea Equipe: Centre de Compétences : MiNaLor micro et nanotechnologies

Articles:

•

Mortet, V., Vasin, A., Jouan, P.-Y., Elmazria, O. and Djouadi, M.-A.

Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications

Surface and Coatings Technology, 176(1):88-92

2003

http://www.scopus.com/inw...719e9e2e7551164c9e3c48997

Equipe: Centre de Compétences : MiNaLor micro et nanotechnologies

•

Mortet, V., Elmazria, O., Nesládek, M., D'Haen, J., Vanhoyland, G., Elhakiki, M., Tajani, A., Bustarret, E., Gheeraert, E., D'Olieslaeger, M. and Alnot, P.

Study of aluminium nitride/freestanding diamond surface acoustic waves filters

Diamond and Related Materials, 12(3-7):723-727

2003

http://www.scopus.com/inw...7684ae2924f00f343a14021ea

Equipe: Centre de Compétences : MiNaLor micro et nanotechnologies

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