Publications: Articles
Article
| Titre: | Chemical vapour deposition enhanced by atmospheric microwave plasmas: a large scale industrial process or the next manufacturing tool? |
|---|---|
| Auteurs: | Belmonte, T., Gries, T., Cardoso, R.P., Arnoult, G., Kosior, F. and Henrion, G. |
| Journal: | Plasma Sources Science and Technology |
| Annee: | 2011 |
| Volume: | 20 |
| Pages: | 024004 |
| Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |