Titre: | AlN/sapphire: Promising structure for high temperature and high frequency saw devices |
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Auteurs: | Blampain, E., Elmazria, O., Aubert, T., Assouar, B.M. and Legrani, O. |
Journal: | IEEE Sensors Journal |
Annee: | 2013 |
Volume: | 13 |
olabel_issue: | 12 |
Pages: | 4607-4612 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |