Titre: | Characterization of energetic and thermalized sputtered atoms in pulsed plasma using time-resolved tunable diode-laser induced fluorescence. |
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Auteurs: | Desecures, M., de Poucques, L., Easwarakhanthan, T. and Bougdira, J. |
Journal: | Applied Physics Letters |
Annee: | 2014 |
Volume: | 105 |
Pages: | 181120-181124 |
Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |