Titre: | In situ high-temperature characterization of AlN-based surface acoustic wave devices |
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Auteurs: | Aubert, T., Bardong, J., Legrani, O., Elmazria, O., Badreddine Assouar, M., Bruckner, G. and Talbi, A. |
Journal: | Journal of Applied Physics |
Annee: | 2013 |
Volume: | 114 |
olabel_issue: | 1 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |