Publications: Articles
Article
| Titre: | Analysis of the transport of ionized titanium atoms in a highly ionized sputter deposition process. |
|---|---|
| Auteurs: | De Poucques, L, Imbert, J-C, Boisse-Laporte, C, Bretagne, J, Ganciu, M, Teulé-Gay, L, Vasina, P and Touzeau, M |
| Journal: | Plasma processes and polymers |
| Annee: | 2007 |
| Volume: | 4 |
| Pages: | S424 |
| Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |