Publications: Articles
Article
| Titre: | Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band |
|---|---|
| Auteurs: | Kirsch, P., Assouar, M.B., Elmazria, O., El Hakiki, M., Mortet, V. and Alnot, P. |
| Journal: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
| Annee: | 2007 |
| Volume: | 54 |
| olabel_issue: | 7 |
| Pages: | 1486-1491 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |