Publications: Articles
Article
| Titre: | Characteristics of argon and helium plasmas created by microwave discharge at atmospheric pressure |
|---|---|
| Auteurs: | Belmonte, T., Cardoso, R. P., Noel, C., Henrion, G. and Kosior, F. |
| Journal: | Informacije Midem-Journal of Microelectronics Electronic Components and Materials |
| Annee: | 2007 |
| Volume: | 37 |
| olabel_issue: | 3 |
| Pages: | 117-122 |
| Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |