Articles: | |
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Physical Review B - Condensed Matter and Materials Physics,
83(18)
2011
Equipe: Département P2M : Nanomagnétisme et Electronique de Spin |
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PHYSICAL REVIEW B,
84(16)
2011
ISSN: 1098-0121
Equipe: Département P2M : Surfaces et Spectroscopies |
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Physical Review B: Condensed Matter,
84:224306
2011
Equipe: Département CP2S : Matériaux à propriétés thermoélectriques |
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PHYSICAL REVIEW LETTERS,
107(18)
2011
ISSN: 0031-9007
Equipe: Département P2M : Surfaces et Spectroscopies |
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Glass Physics and Chemistry,
37:411â??417
2011
Equipe: Département CP2S : Elaboration et Fonctionnalité de Couches Minces |
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Thin Solid Films,
519(13):4177-4185
2011
Equipe: Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |
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THIN SOLID FILMS,
519(13):4177-4185
2011
ISSN: 0040-6090
Mots clefs: Plasma-enhanced chemical vapor deposition; Hexamethyldisiloxane; Microwave assisted chemical vapor deposition; Resonant cavity; Afterglow; Post discharge Resume: The post-discharge of a microwave resonant cavity working at atmospheric pressure is used to enhance deposition of SiOx thin films from HMDSO by chemical vapor deposition. Maximum static deposition rates are close to 150 mu m h(-1) for low power consumption per unit of coated width (similar to 100 W/cm). Dynamic deposition rates are close to 3.5 nm ms(-1). The distribution of the coating thickness is heterogeneous over an area of 150 x 90 mm(2). The influence of the main parameters of the process is systematically studied to show how the key reactions, i.e. gas phase synthesis of powders and surface deposition, are correlated. (C) 2011 Elsevier B.V. All rights reserved. Equipe: Centre de Compétences : ERMIONE informatique et calcul |
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Investigation of thermal decomposition of lignin samples isolated from aspen wood by various methods
Journal of the Siberian Federal University. Chemistry,
4:221-232
2011
Equipe: Département CP2S : Matériaux Carbonés |
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Corrosion Engineering Science and Technology,
46(4):425-431.
2011
Equipe: Département CP2S : Surface et Interface, réactivité chimique des matériaux |
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Materials Research-Ibero-American Journal of Materials,
14(4):519-523
2011
Equipe: Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |