Publications: Articles
Article
| Titre: | The influence of CH4 addition on composition, structure and optical characteristics of SiCN thin films deposited in a CH4/N-2/Ar/hexamethyldisilazane microwave plasma |
|---|---|
| Auteurs: | Bulou, S., Le Brizoual, L., Miska, P., de Poucques, L., Hugon, R., Belmahi, M. and Bougdira, J. |
| Journal: | Thin Solid Films |
| Annee: | 2011 |
| Volume: | 520 |
| olabel_issue: | 1 |
| Pages: | 245-250 |
| Equipe: | Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS |