Titre: | Behavior of platinum/tantalum as interdigital transducers for SAW devices in high temperature environments |
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Auteurs: | T. Aubert, O. Elmazria, B. Assouar, L. Bouvot, M. Hehn, S. Weber, M. Oudich and Genève, D. |
Journal: | Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Annee: | 2011 |
Volume: | in press |
Equipe: | Centre de Compétences : Microscopies et Microsondes |