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References

2013

Articles:

Cardenas, Luis, Gutzler, Rico, Lipton-Duffin, Josh, Fu, Chaoying, Brusso, Jaclyn L., Dinca, Laurentiu E., Vondracak, Martin, Fagot-Revurat, Yannick, Malterre, Daniel, Rosei, Federico and Perepichka, Dmitrii F.
CHEMICAL SCIENCE, 4(8):3263-3268
2013
ISSN: 2041-6520

Equipe: Département P2M : Surfaces et Spectroscopies

Lundin, D., Vitelaru, C., Poucques, De, Brenning, N. and Minea., T.
Journal of Physics D: Applied Physics, 46:175201
2013

Resume: A 3D Monte Carlo code (OMEGA) was developed to simulate the transport of sputtered atoms in a magnetron discharge operating in direct current mode. Collisions between the sputtered Ti atoms and the neutral process gas atoms (Ar) were modelled. Spatially resolved simulated velocity distributions of the sputtered particles parallel as well as perpendicular to the cathode surface for different operating pressures were recorded and benchmarked against experimentally obtained profiles using laser-induced fluorescence. New differential (angular and energy-dependent) cross sections for Ti-Ar elastic collisions were thereby obtained, which resulted in good agreement between modelled and experimental results. The differences with respect to commonly used extrapolated Ar-Ar cross sections to describe the Ti-Ar interaction are highlighted and discussed.

Equipe: Département CP2S : Expériences et Simulations des Plasmas Réactifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS

Van Landeghem, H.P., Goune, M., Epicier, T. and Redjaïmia, A.
Scripta Materialia, 68:187--190
2013

Equipe: Département SI2M : Microstructures et Contraintes

2012

Articles:

Lahlou, H., Sanchez, J. B., Mohsen, Y., Vilanova, X., Berger, F., Llobet, E., Correig, X., Fierro, V., Celzard, A., Gràcia, I. and Canè, C.
Microsystem Technologies, 18:489-495
2012

Equipe: Département CP2S : Matériaux Carbonés

Devynck, S., Gradeck, M., Bellot, J.P., Denis, S., Vaelez, M. and Benard, T.
Key Engineering Materials, 504-506:1049-1054
2012

Equipe: Département SI2M : Microstructures et Contraintes

Nair, M. N., Cranney, M., Vonau, F., Aubel, D., Le Fèvre, P., Tejeda, A., Bertran, F., Taleb-Ibrahimi, A. and Simon, L.
PHYSICAL REVIEW B, 85(24)
2012
ISSN: 1098-0121

Equipe: Département P2M : Surfaces et Spectroscopies

Gabor, M.S., Petrisor Jr., T., Tiusan, C., Hehn, M., Vasile, B.S. and Petrisor, T.
Journal of Applied Physics, 111(8)
2012

Equipe: Département P2M : Nanomagnétisme et Electronique de Spin

Endrino, J.L., Anders, A., Andersson, J., Horwat, D. and VINNICHENKO, M.
Journal of Materials Research, 27:741-742
2012

Equipe: Département CP2S : Elaboration et Fonctionnalité de Couches Minces

Van Landeghem, H., Goune, M. and Redjaïmia, A.
Steel Research International, 83 (6):590--593
2012

Equipe: Département SI2M : Microstructures et Contraintes

Chaia, N., MATHIEU, S., Le Flem, M and VILASI, M.
Surface and Coatings Technology, in press
2012

Equipe: Département CP2S : Surface et Interface, réactivité chimique des matériaux

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