Titre: | Angular distribution of GaAs sputtered under oblique Cs+ bombardment |
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Auteurs: | Verdeil, C, Wirtz, T and Scherrer, H |
Journal: | Nuclear instruments & methods in physics research section B-beam interactions with materials and atoms |
Annee: | 2009 |
Volume: | 267 |
olabel_issue: | 16 |
Pages: | 2745-2747 |
Equipe: | Département CP2S : Matériaux à propriétés thermoélectriques |