Publications: Articles
Article
| Titre: | Angular distribution of GaAs sputtered under oblique Cs+ bombardment |
|---|---|
| Auteurs: | Verdeil, C, Wirtz, T and Scherrer, H |
| Journal: | Nuclear instruments & methods in physics research section B-beam interactions with materials and atoms |
| Annee: | 2009 |
| Volume: | 267 |
| olabel_issue: | 16 |
| Pages: | 2745-2747 |
| Equipe: | Département CP2S : Matériaux à propriétés thermoélectriques |