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bib
--- Timezone: CET
Creation date: 2021-02-27
Creation time: 11-32-35
--- Number of references
2
article
Mortet200388
Aluminium nitride films deposition by reactive triode sputtering for surface acoustic wave device applications
Surface and Coatings Technology
2003
176
1
88-92
Centre de Compétences : MiNaLor micro et nanotechnologies
http://www.scopus.com/inward/record.url?eid=2-s2.0-0242498787&partnerID=40&md5=cd32363719e9e2e7551164c9e3c48997
V.Mortet
A.Vasin
P.-Y.Jouan
O.Elmazria
M.-A.Djouadi
article
Mortet2003723
Study of aluminium nitride/freestanding diamond surface acoustic waves filters
Diamond and Related Materials
2003
12
3-7
723-727
Centre de Compétences : MiNaLor micro et nanotechnologies
http://www.scopus.com/inward/record.url?eid=2-s2.0-0038184125&partnerID=40&md5=6d2ae6b7684ae2924f00f343a14021ea
V.Mortet
O.Elmazria
M.Nesládek
J.D'Haen
G.Vanhoyland
M.Elhakiki
A.Tajani
E.Bustarret
E.Gheeraert
M.D'Olieslaeger
P.Alnot