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@Article { Elmazria2003416,
   title = {Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering},
   journal = {Physica Status Solidi (A) Applied Research},
   year = {2003},
   volume = {196},
   number = {2},
   pages = {416-421},
   note = {Centre de Comp{\'e}tences : MiNaLor micro et nanotechnologies},
   web_url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-0038361108\&partnerID=40\&md5=365508527dc2d97a741fa00a311db9db},
   author = {Elmazria, O. and Assouar, M.B. and Renard, P. and Alnot, P.}
}