This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-03-06 Creation time: 19-27-32 --- Number of references 1 article Elmazria2003416 Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering Physica Status Solidi (A) Applied Research 2003 196 2 416-421 Centre de Compétences : MiNaLor micro et nanotechnologies http://www.scopus.com/inward/record.url?eid=2-s2.0-0038361108&partnerID=40&md5=365508527dc2d97a741fa00a311db9db O.Elmazria M.B.Assouar P.Renard P.Alnot