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bib
--- Timezone: CET
Creation date: 2021-03-06
Creation time: 19-27-32
--- Number of references
1
article
Elmazria2003416
Electrical properties of piezoelectric aluminium nitride films deposited by reactive dc magnetron sputtering
Physica Status Solidi (A) Applied Research
2003
196
2
416-421
Centre de Compétences : MiNaLor micro et nanotechnologies
http://www.scopus.com/inward/record.url?eid=2-s2.0-0038361108&partnerID=40&md5=365508527dc2d97a741fa00a311db9db
O.Elmazria
M.B.Assouar
P.Renard
P.Alnot