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@Article { 1004-1573,
   title = {A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature},
   journal = {Materials Science and Engineering},
   year = {2010},
   volume = {12},
   note = {Centre de Comp{\'e}tences : Microscopies et Microsondes},
   author = {S. Touimi, I. Jauberteau, S. Weber, A. Bessaudou, A. Passelergue, R. Mayet, J.L. Jauberteau and Aubreton, J.}
}