A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature

This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-01-23 Creation time: 03-32-22 --- Number of references 1 article 1004-1573 A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature Materials Science and Engineering 2010 12 Centre de Compétences : Microscopies et Microsondes I. Jauberteau, S. Weber, A. Bessaudou, A. Passelergue, R. Mayet, J.L. JauberteauS. Touimi J.Aubreton