% % This file was created by the TYPO3 extension % bib % --- Timezone: CET % Creation date: 2021-03-07 % Creation time: 01-41-47 % --- Number of references % 1 % @Article { 201-9, title = {Pressure effect on the velocity and flux distributions of sputtered metal species in magnetron discharge measured by space-resolved tunable diode laser induced fluorescence.}, journal = {Plasma processes and polymers}, year = {2009}, volume = {6}, pages = {S326}, note = {D{\'e}partement CP2S : Exp{\'e}riences et Simulations des Plasmas R{\'e}actifs - Interaction plasma-surface et Traitement des Surfaces ESPRITS}, author = {Vitelaru, C and De Poucques, L and Hytkova, T and Minea, T M and Boisse-Laporte, C and Bretagne, J and Popa, G} }