Analysis of the transport of ionized titanium atoms in a highly ionized sputter deposition process.

This file was created by the TYPO3 extension bib --- Timezone: CET Creation date: 2021-01-27 Creation time: 09-44-54 --- Number of references 23 article 201-141 Analysis of the transport of ionized titanium atoms in a highly ionized sputter deposition process. 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