Titre: | Investigations on AlN/sapphire piezoelectric bilayer structure for high-temperature SAW applications |
---|---|
Auteurs: | Aubert, T., Elmazria, O., Assouar, B., Blampain, E., Hamdan, A., Genève, D. and Weber, S. |
Journal: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
Annee: | 2012 |
Volume: | 59 |
olabel_issue: | 5 |
Pages: | 999-1005 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |