Publications: Articles
Article
| Titre: | Packageless AlN/ZnO/Si structure for SAW devices applications |
|---|---|
| Auteurs: | Legrani, O., Elmazria, O., Zhgoon, S., Pigeat, P. and Bartasyte, A. |
| Journal: | IEEE Sensors Journal |
| Annee: | 2013 |
| Volume: | 13 |
| olabel_issue: | 2 |
| Pages: | 487-491 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |