Titre: | A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature |
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Auteurs: | S. Touimi, I. Jauberteau, S. Weber, A. Bessaudou, A. Passelergue, R. Mayet, J.L. Jauberteau and Aubreton, J. |
Journal: | Materials Science and Engineering |
Annee: | 2010 |
Volume: | 12 |
Equipe: | Centre de Compétences : Microscopies et Microsondes |