Publications: Articles
Article
| Titre: | A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature |
|---|---|
| Auteurs: | S. Touimi, I. Jauberteau, S. Weber, A. Bessaudou, A. Passelergue, R. Mayet, J.L. Jauberteau and Aubreton, J. |
| Journal: | Materials Science and Engineering |
| Annee: | 2010 |
| Volume: | 12 |
| Equipe: | Centre de Compétences : Microscopies et Microsondes |