Publications: Articles
Article
| Titre: | Structural and mechanical properties of a-C:H and Si doped a-C:H thin films grown by LF-PECVD |
|---|---|
| Auteurs: | Chouquet, C., Gerbaud, G., Bardet, M., BARRAT, S., Billard, A., Sanchette, F. and Ducros, C. |
| Journal: | Surface and Coatings Technology |
| Annee: | 2009 |
| Volume: | 204 |
| olabel_issue: | 9-10 |
| Pages: | 1339 |
| Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |