Titre: | Mechanical properties of a-C:H/Si-containing a-C:H multilayered coatings grown by LF-PECVD |
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Auteurs: | CHOUQUET, C, DUCROS, C, BARRAT, S., BILLARD, A and SANCHETTE, F |
Journal: | Surface and Coatings Technology |
Annee: | 2008 |
Volume: | 203 |
Pages: | 745-749 |
Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |