Publications: Articles
Article
| Titre: | Role of silicon on the growth mechanisms of CNx and SiCN thin films by N2/CH4 microwave plasma assisted chemical vapour deposition |
|---|---|
| Auteurs: | Kouakou, P., Brien, M. Belmahi V., Hody, V., Migeon, H.N. and Bougdira, J. |
| Journal: | Surface coating and technology |
| Annee: | 2008 |
| Volume: | 203 |
| Pages: | 277-283 |
| Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |