Publications: Articles
Article
| Titre: | Influence of substrate temperature on the structural, dielectric and optical properties of RF magnetron sputtered Ta2O5 films |
|---|---|
| Auteurs: | Uthanna, S., Chandra, S.V. Jagadeesh, Rao, G. Mohan and Pierson, J.F. |
| Journal: | IOP Conference Series: Materials Science and Engineering |
| Annee: | 2010 |
| Volume: | 8 |
| Pages: | 012025 |
| Equipe: | Département CP2S : Elaboration et Fonctionnalité de Couches Minces |