Congrés - Conférences
Conference
| Titre: | Study of acoustical and optical properties of AlN films for SAW and BAW devices: Correlation between these properties |
|---|---|
| Auteurs: | Assouar, M.B., Elmazria, O., El Hakiki, M. and Alnot, P. |
| Journal: | Integrated Ferroelectrics |
| Annee: | 2006 |
| Volume: | 82 |
| Number: | 1 |
| Pages: | 45-54 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |