Congrés - Conférences
Conference
| Titre: | AlN/IDT/AlN/Sapphire as packageless structure for SAW applications in harsh environments |
|---|---|
| Auteurs: | Legrani, O., Elmazria, O., Bartasyte, A., Aubert, T. and Talbi, A. |
| Journal: | IEEE International Ultrasonics Symposium, IUS |
| Annee: | 2012 |
| Pages: | 2102-2105 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |