Congrés - Conférences
Conference
| Titre: | Study of temperature coefficient of frequency and electromechanical coupling coefficient of X band frequency SAW devices based on AlN/diamond layered structure |
|---|---|
| Auteurs: | Assouar, M.B., Elmazria, O., Kirsch, P., Alnot, P. and Mortet, V. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2007 |
| Pages: | 284-287 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |