Titre: | New measurement method to characterize piezoelectric SAW substrates at very high temperature |
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Auteurs: | Nicolay, P., Elmazria, O., Sarry, F., Aubert, T., Bouvot, L. and Hehn, M. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2008 |
Pages: | 1877-1880 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |