Congrés - Conférences
Conference
| Titre: | C-axis inclined ZnO films deposited by reactive sputtering using an additional blind for shear BAW devices |
|---|---|
| Auteurs: | Link, M., Schreiter, M., Weber, J., Pitzer, D., Primig, R., Assouar, M.B. and Elmazria, O. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2005 |
| Volume: | 1 |
| Pages: | 202-205 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |