Congrés - Conférences
Conference
| Titre: | Packageless temperature sensor based on AlN/IDT/ZnO/Silicon layered structure |
|---|---|
| Auteurs: | Legrani, O., Elmazria, O., Elhosni, M., Bartasyte, A., Pigeat, P. and Zghoon, S. |
| Journal: | 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013 |
| Annee: | 2013 |
| Pages: | 259-261 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |