Congrés - Conférences
Conference
| Titre: | 5GHz SAW devices based on AlN/diamond layered structure |
|---|---|
| Auteurs: | Kirsch, P., Assouar, M.B., Elmazria, O. and Alnot, P. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2006 |
| Volume: | 1 |
| Pages: | 2293-2296 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |