Titre: | 5GHz SAW devices based on AlN/diamond layered structure |
---|---|
Auteurs: | Kirsch, P., Assouar, M.B., Elmazria, O. and Alnot, P. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2006 |
Volume: | 1 |
Pages: | 2293-2296 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |