Titre: | High frequency and high temperature SAW devices based on nanocrystalline diamond film on Langasite substrate |
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Auteurs: | El Hakiki, M., Elmazria, O., B, F., Nicolay, P., Azouani, R. and Mon, D. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2006 |
Volume: | 1 |
Pages: | 2310-2313 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |