Titre: | High sensitivity pressure sensor in the range [0-100mTorr] based on surface acoustic wave device |
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Auteurs: | Nicolay, P., Elmazria, O., Sarry, F., Marche, N., Bouvot, L. and Kambara, H. |
Journal: | Proceedings - IEEE Ultrasonics Symposium |
Annee: | 2006 |
Volume: | 1 |
Pages: | 1498-1500 |
Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |