Congrés - Conférences
Conference
| Titre: | High sensitivity pressure sensor in the range [0-100mTorr] based on surface acoustic wave device |
|---|---|
| Auteurs: | Nicolay, P., Elmazria, O., Sarry, F., Marche, N., Bouvot, L. and Kambara, H. |
| Journal: | Proceedings - IEEE Ultrasonics Symposium |
| Annee: | 2006 |
| Volume: | 1 |
| Pages: | 1498-1500 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |