Congrés - Conférences
Conference
| Titre: | Development of SAW pressure sensor using ZnO/Si structure |
|---|---|
| Auteurs: | Talbi, A., Sarry, F., Le Brizoual, L., Elmazria, O. and Alnot, P. |
| Journal: | Proceedings of the IEEE International Frequency Control Symposium and Exposition |
| Annee: | 2005 |
| Pages: | 566-570 |
| Equipe: | Centre de Compétences : MiNaLor micro et nanotechnologies |